ASM→
Process Engineering Intern at ASM in Fields, OR
InternshipOn-siteFields, OR
Skills
transmission electron microscopyellipsometrydesign of experimentsstatistical analysismetrologyphysicschemistrymaterial science
Job Description
Summary: ASM is a leader in advanced semiconductor technology and innovation, seeking a motivated intern to support advanced metrology development activities. The role focuses on improving measurement accuracy and modeling robustness across key characterization techniques in semiconductor process characterization.
Responsibilities:
- Characterize sample to sample and region to region variability in TEM measurements
- Quantify measurement uncertainty and establish statistically meaningful error bars
- Translate TEM measurement error into corresponding DOE model error
- Assess how measurement uncertainty impacts p values, model significance, and predictive validity
- Propose methods to reduce overall model noise—either through measurement improvements or smarter experimental design
- Support extraction and optimization of refractive index (n) and extinction coefficient (k) for new films
- Analyze how ellipsometry model assumptions impact derived film thickness and composition
- Investigate thickness dependent behavior: identify thresholds where goodness of fit (GoF) degrades as thickness increases
- Evaluate breakdown mechanisms (e.g., over simplified dispersion models, depolarization effects, parameter cross correlation)
- Combine metrology data streams (TEM, ellipsometry) to build more realistic input distributions for DOE
- Quantify how measurement error propagates into model confidence levels and sensitivity indices
- Recommend approaches to improve DOE outcomes (e.g., reduced uncertainty, alternative sampling plans, model weighting)
- Deliver a quantified error propagation framework linking key metrology tools to DOE output quality
- Deliver a statistical report detailing major sources of measurement uncertainty and recommended mitigation paths
- Deliver updated ellipsometry models (n, k, dispersion) or parameter sets that improve GoF for thick films
- Deliver a final technical presentation summarizing findings, insights, and process improvement opportunities
Required Qualifications:
- Working towards his doctoral degree with focus on Physics, chemistry or material science
- Other engineering disciplines might be considered
Required Skills: Transmission Electron Microscopy, Ellipsometry, Design of Experiments, Statistical Analysis, Metrology, Physics, Chemistry, Material Science